CHEN 475: Microelectronics Process Engineering

Course Description

Credits 3.
3 Lecture Hours.State-of-the-art process engineering principles on microelectronics, especially for the fabrication of very large scale integrated circuits (VLSICs); fundamental unit processes, such as thin film deposition, thermal growth, lithography, etching and doping, material structures and properties, and basic device operation principles.Prerequisites:CHEN 354andCHEN 364or approval of instructor;CHEM 322.