ECEN 472: Microelectronic Circuit Fabrication

Electrical & Computer Engineering Texas A & M University-College Station 4.0 credits

Course Description

Credits 4.
3 Lecture Hours.
3 Lab Hours.Fundamentals of MOS and bipolar microelectronic circuit fabrication; theory and practice of diffusion, oxidation, ion implantation, photolithography, etch; yield and reliability considerations; statistical process control; integrated process design, simulation and characterization.Prerequisites:Grade of C or better inECEN 325andECEN 370; junior or senior classification.

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