MMET 414: Micro/Nano Manufacturing
Course Description
Credits 3.
2 Lecture Hours.
3 Lab Hours.Product miniaturization and impact; review of atomic structure, electrical and physical properties of materials; ultraprecision machining; microlithography; dry and wet etching/sputtering techniques; isotropic and anisotropic processes; pattern transfer with additive processes; surface micromachining; microreplication processes; introduction to packaging technology and nanometrology; manufacturing of selected microsystems (MEMS) and their applications.Prerequisites:Grade of C or better inCHEM 107,PHYS 207, andENGR 217/PHYS 217orPHYS 217/ENGR 217; junior or senior classification in manufacturing and mechanical engineering technology.