E&C ENGR 440: Principles of Nanomanufacturing

Course Description

Students will evaluate semiconductor processing theory and applications as well as limitations of existing process techniques. Advances in both physical implementation and circuit/integration techniques will be introduced along with an overview of topics such as optical lithography, EUV lithography, nanoimprint, implantation and manufacturing aware circuit design. Students will also participate in modeling and simulation laboratory work with state-of-the-art semiconductor processing and device simulation tools such as SRIM, Sentaurus TCAB Process and Sentaurus TCAD Device.